Semiconductors & ElectronicsGas Purity as the Bedrock of Fabrication
Semiconductor fabrication facilities must maintain highly stringent standards for precision and purity. In fact, a single particulate can compromise chip integrity and detrimentally impact production yield.
At the same time, increasing expectations for yield optimization are challenging fabs to produce a greater number of wafers than ever before. To balance exceedingly high-quality standards and ever-increasing production demands, fabrication plants must leverage quality gas delivery and purification equipment that is proven to uphold unerring purity without pause.
ARM Purification’s ultra-high purity components are manufactured in line with the highest industry standards and proven to deliver the ultra high purity gases and cryogens necessary for successful fabrication and maximum yield.
Solving the Top Challenges for the Semiconductor & Electronic Industry
Process Purity
A single process impurity risks compromising an entire wafer’s integrity, requiring fabs to pair high-quality fabrication equipment with pure process and purge gases.
ARM Purification’s purifier components are manufactured in line with the most stringent standards for UHP purification to keep process gases pure throughout the fabrication process.
Yield Expectations
Advancing technology has led to increasingly high expectations for productivity and efficiency, challenging fabs to produce a greater number of wafers at increasingly rapid rates.
Our purifiers are built to endure through the wear and tear of continuous operation. When one reaches end of life, we expedite regeneration to get operations up and running as quickly as possible.
Process Flexibility
Innovative manufacturing approaches are driving demand for more exacting delivery of specialty gases at precise pressures, temperatures, and flow rates.
From ammonia to xenon, ARM Purification has proven purifier solutions for all UHP gases and cryogens across a wide variety of flow rates and with a diverse range of customization options.
Explore Our Products
Our suite of purifier solutions deliver total process excellence in complex fab environments.
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Point-of-Use Purifiers
Low flow rate purifiers serving single applications that require high-precision control.
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Bulk Purifiers
Large flow rate purifiers configurable to versatile applications.
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Speak to an Expert
Talk to a member of the ARM Purification team to identify the right purifier solution by gas type and impurity to be removed.
Purifier Excellence, from System to Support
From regeneration, to tech refreshes, and on-site installation, discover the best-in-class services that support our purifier technology.
